Preparation and Properties of the Indium Zinc Oxide by Reactive Magnetron Co-sputtering using Indium and Zinc Metallic Targets
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === Transparent conducting Indium Zinc Oxide (IZO) films were prepared on a cleaned Corning Eagle2000 glass substrate by a reactive magnetron co-sputtering. The IZO thin films are frequently deposited from ceramic targets, however, a cost reduction is expected i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f9sjc9 |