Fabrication and Characterization of MgxZn1-xO Based UV Photodetectors
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === In this study, MgxZn1-xO (x=0, 0.1, 0.2, 0.3 and 0.36) films have been deposited on sapphire substrates at room temperature by using radio frequency magnetron sputtering system with difference radio frequency power, sputtering pressure and oxygen flow rate....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mr426v |