Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === In this paper, a 3-DOF ( Z-tilts) nanometer positioning stage was developed using a three-axes PZT actuators, three integrated flexure hinge and three degrees of freedom laser measuring system with 10 nm positioning resolution and 0.1 arcsec resolution in p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zh35ja |