Computer Simulation on the Remelting and Solidification of LCD Silicon Film
碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === Excimer lasers are used to remelt silicon film to fabricate low temperature poly-silicon (LTPS), but are encountered with a difficult narrow processing window to control the solidification mechanism. Most research conducted on silicon crystal growths have been do...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bvgyyg |