Development of In-Situ Time-Resolved Optical Inspection System for Thin Films Fabricated by Excimer Laser Annealing and Investigation on Recrystallization Mechanism
博士 === 國立臺灣科技大學 === 機械工程系 === 95 === An in-situ real-time time-resolved optical reflectivity and transmissivity (TRORT) inspection system combining two He-Ne probe lasers, three photodiodes and a fast digital oscilloscope was developed to investigate the recrystallization mechanism of silicon thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v6cmbm |