An Analytical Solution to the Pull-in Voltage of the Micro Curled Cantilever Beam subjected to Electrostatic Load and Its Application to Extract the Young’s Modulus and Stress Gradient of Thin Films
碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === ABSTRACT The analytical modeling of the electrostatic devices is quite complicated and difficult in virtue of such effects as the electric-mechanical coupling effect, the nonlinearity of the electrostatic force, the fringe field, and the pre-deformation of the mi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18803571709271847805 |