The study of the film structure of Au(Be)/ GaAsP(100) wafer
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 95 === The experiment we have performed is to study the metal layers of Au/AuBe/Au onto GaAsP(100) wafers. The metal films were deposited by a thermal-evaporation method. After the deposition process, the GaAsP wafers were annealed in a traditional tube furnace for Oh...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47330460710424627940 |