Fabrication of 2D Photonic Crystal Slab Waveguides using Near-Field Phase-Shifting Contact Lithography and Interference Lithography
碩士 === 國立臺灣大學 === 電機工程學研究所 === 95 === This thesis describes an approach to fabricate a 2-dimensioinal photonic crystal waveguide by combining near-field phase-shifting contact lithography and interference lithography. The elastomeric phase mask is fabricated by casting and curing the prepolymer...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19848773817601451034 |