Design and Coupled Field Analysis of Two-Axis MEMS Scanners with Hidden Radial Vertical Comb-Drive Actuators
碩士 === 臺灣大學 === 光電工程學研究所 === 95 === Abstract We have designed a two-axis scanner with hidden radial vertical comb drive actuator. The device is fabricated using SUMMiT-VTM micromaching process offered by Sandia National Laboratory.It has five polysilicon structual layers. A cross-bar spring structur...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74208257794584143343 |