Design and Fabrication of Micro Accelerometers with a Hybrid Sensing Technology
碩士 === 國立臺灣大學 === 光電工程學研究所 === 95 === The goal of this thesis is to increase the sensing types in a micro accelerometer and to achieve batch-fabricated utilizing a kind of MEMS fabrication technology. The micro accelerometer’s dimension is 1970μm×1610μm, and it is fabricated by the MetalMUMPs proces...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97530492298551700014 |