Preparation and Characterizations of ZnO Doped with Al and Ga by Electron-Beam Evaporation

碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 95 === Abstract Aluminum-doped zinc oxide and gallium-doped zinc oxide films have been prepared by electron beam evaporation onto the glass substrates with different substrate temperatures and oxygen work pressures. Based on the effect of substrate temperature, the ex...

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Bibliographic Details
Main Authors: Mark Hsiao, 蕭榮華
Other Authors: J.P.Chu
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/96248964255181959216