A vernier-type displacement sensing mechanism using suspended gate FET for comb-drive actuators
碩士 === 國立清華大學 === 微機電工程研究所 === 95 ===
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71875892872572536108 |