Fabrication process of SAW devices
碩士 === 國立清華大學 === 電子工程研究所 === 95 === Abstract In this thesis, our object is the fabrication process of SAW device, we divided our work into three parts： First, we used the LP-MOCVD system to deposited aluminum and aluminum nitride thin films, and found out the optimum deposited condition. Secondly,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13649684900587761747 |