Novel Nanowire SONOS TFTs Functioned as Nonvolatile Memory and Transistor

Novel Nanowire SONOS TFTs Functioned as Nonvolatile Memory and Transistor

博士 === 國立清華大學 === 電子工程研究所 === 95 === In first part, presents a method to enhance the performance of polycrystalline silicon thin film transistors (ploy-Si TFTs) by using an oxide-nitride-oxide (ONO) gate dielectric and the multiple nanowire channels structure. Experimental results indicate that the...

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Bibliographic Details
Main Authors:	Shih-Ching Chen, 陳世青
Other Authors:	Chen-Hsin Lien
Format:	Others
Language:	zh-TW
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/94449017372591563788

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