Novel Nanowire SONOS TFTs Functioned as Nonvolatile Memory and Transistor
博士 === 國立清華大學 === 電子工程研究所 === 95 === In first part, presents a method to enhance the performance of polycrystalline silicon thin film transistors (ploy-Si TFTs) by using an oxide-nitride-oxide (ONO) gate dielectric and the multiple nanowire channels structure. Experimental results indicate that the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94449017372591563788 |