Design and fabrication of aluminum nitride thin film bulk acoustic wave devices
博士 === 國立清華大學 === 電子工程研究所 === 95 === Film bulk acoustic wave devices show considerable promise as an integrated solution for RF bandpass filter, duplexer and sensor. This thesis is devoted to the analysis, design, and fabrication of film bulk acoustic wave devices, which are targeted for RF front-en...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56238313719318909558 |