Cell-based & Modulized Nanometer Interconnect Test Structure Generator for BEoL
碩士 === 國立清華大學 === 資訊工程學系 === 95 === In the semiconductor industry, test structures are the important method used to observe the parameters’ variation scope of new process, and establish process corner model. When the VLSI manufacturing technology develops from micro-Al to nanometer-Cu process, many...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/24054100523068758060 |