The Effect of Surface Treatment on the Electrical Properties of ZrO2 MIS Capacitors
碩士 === 國立清華大學 === 產業研發碩士積體電路設計專班 === 95 === The effect of surface treatment on the electrical properties of ZrO2 MIS capacitor was studied with pre-H2O2 and post-diluted HCl. The interface state was reduced from 5.6 × 1013 cm-2 to 4 × 1012 cm-2. From TEM analysis, the interfacial layer reduced from...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81862475397029859399 |