A Thermal-Bubble-Based Micromachined Accelerometer
博士 === 國立清華大學 === 動力機械工程學系 === 95 === A novel micromachined accelerometer based on micro thermal-bubble technology is proposed and demonstrated in this dissertation. Unlike the other techniques, the only moving element in this accelerometer is a small thermal-bubble created by using a high flux hea...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50341559448020237673 |