Effects of Pattern Size and Process Parameters on the Formability of Metallic Direct Nanoimprint Technology
博士 === 國立清華大學 === 動力機械工程學系 === 95 === This dissertation presents mainly an experimental investigation into the effects of the metallic thin films properties, mold geometries, and process parameters on the formation of nano patterns on metallic thin films by using direct nanoimprint technique. By the...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16557869412963361983 |