Direct micro/nano metallic imprint formation –A molecular dynamics simulation and experiment
博士 === 國立清華大學 === 動力機械工程學系 === 95 === Nanoimprinting lithography is considered to be one of the methods with the most potential for the fabrication of nano-structures. This study proposes an alternative manufacturing process, the direct imprint method, which is different from nanoimprinting lithogra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66720516670934851509 |