上閘極單壁奈米碳管場效電晶體之研究
碩士 === 國立清華大學 === 材料科學工程學系 === 95 === Generally single wall carbon nanotubes (SWNTs) grow in the vertical direction on the catalytic metal plane. Therefore we deposited an Al layer of 10 nm on the catalytic layer by sputtering. The Al layer plays the role of a barrier to prevent vertical growth of t...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18115259799637214706 |