The development and application of the ultra-nano crystalline diamond film in field emission device
碩士 === 國立清華大學 === 材料科學工程學系 === 95 === In this work, the ultra-nano crystalline diamond film(UNCD) was grown on the molybdenum(Mo-Si)、tungsten(W-Si) films and molybdenum(Mo-B)、tungsten(W-B) bulks by microwave plasma enhanced chemical vapor deposition(MPECVD). The XRD and XPS analysis showed there is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41702858328946360225 |