Fabrication of Nanoelectrodes by Atomic Force Microscopy Nanomachining and Electromigration
碩士 === 國立清華大學 === 材料科學工程學系 === 95 === Nanoelectrodes with nanometer separation (nanogap) are achieved by the combination of atomic force microscopy nanomachining and electromigration. By controlling the force of an atomic force microscopy (AFM) tip on a thin PMMA resist, a nanoscale groove is first...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97635568039389173462 |