Wavelet Transform Algorithm Based Wafer Defect Map Pattern Recognition System in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === In recent years, the semiconductor industry has been a high-growth business. Yield improvement is more and more important for the process of semiconductor manufacturing since it is an important element to ensure the profitability. Defect spatial pattern imped...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16044997140056291981 |