Establishment and Application of an Expert System for Semiconductor Facility Management Control System
碩士 === 國立清華大學 === 工業工程與工程管理學系工程碩士在職專班 === 95 === Semiconductor Industry of Two Trillion and Twin Star Industries Development Plan are prosperous under the Government’s impetus. The density of 12-inches wafers Fab. in Taiwan is the highest in the world and the technique of semiconductor process with...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45473330308599369247 |