The Development of Low Temperature Atmospheric Pressure Plasma System and its Applications
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 95 === In this research, a novel low temperature atmospheric pressure plasma generator is successfully developed. The developed plasma generator can generate uniform plasma discharge under the operating conditions of 5 SLM helium flow rate and 5 Watts RF power. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78223919159008148413 |