System Identification and Dual-Stage Control of a Micro/Nano-Meter XY Precision Positioning Table
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 95 === The purpose of this study is to develop a dual-stage control (DSC) for a micro/nano-meter XY precision positioning table, in which the coarse positioning and fine positioning are dependent on the permanent magnet (PM) synchronous servo motor and piezoelectr...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68560201173408886447 |