Modeling and Compensation of Static and Dynamic Hysteresis of Piezoelectric Actuators

• Main Authors: Po-Lin Chen, 陳柏霖
• Other Authors: Yuan--Chen Yu
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/37785680285608524130

碩士 === 國立高雄第一科技大學 === 系統與控制工程研究所 === 95 === The advancement of precision fabrication and nano/MEMS technologies has made nano positioning become a necessity. Piezoelectric actuator(PA) has been an essential driving device for nano positioning due to its merits of high resolution and stiffness. However, PA exhibits some nonlinearities such as hysteresis, crip and saturation, which will cause position error and/or stability problems in open/closed positioning system. Precisely modeling and compensating of the PA are then necessary for better positioning performance. For these purposes, this research has proposed a simple equivalent RC circuit model which was updated from the previously proposed one to make it capable of modeling not only the static but dynamic hysteresis behavior of a PA. Meanwhile, an inverse hysteresis model with simple RC circuits was proposed to compensate the hysteresis of a PA. It has been verified by computer simulation and real experimentation, that the proposed hysteresis model can precisely model the hysteresis behavior of a PA in both static and dynamic, and that the proposed inverse hysteresis model and circuit can effectively, both in static and dynamic, compensate the hysteresis to make a PA become a linear actuator.