Modeling and Compensation of Static and Dynamic Hysteresis of Piezoelectric Actuators
碩士 === 國立高雄第一科技大學 === 系統與控制工程研究所 === 95 === The advancement of precision fabrication and nano/MEMS technologies has made nano positioning become a necessity. Piezoelectric actuator(PA) has been an essential driving device for nano positioning due to its merits of high resolution and stiffness. Howev...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37785680285608524130 |