Preparation of Dense (002)-oriented ZnO Thin Film by Metal-Organic Chemical Vapor Deposition
碩士 === 國立東華大學 === 材料科學與工程學系 === 95 === In this research, we employed an MOCVD system to produce ZnO film, which has superior (002) preferred orientation and large grain size. We use DMZn, in place of DEZn as the zinc precursor. We discussed the dependence of film characteristics on several different...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/u6pzn2 |