Formation of ordered metal nanostructure arrays fabricated by STM-assisted MOCVD of Mo(CO)6
碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 95 === Abstract In this thesis ,we combine two kinds of manufacturing technology:(1) metalorganic chemical vapor deposition (MOCVD)(2) scanning probe lithography (SPL) to obtain well ordered metallic nanostructure arrays of molybdenum (Mo) dots on Si(111) surface....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19944942692033484874 |