Ultraviolet Soft-Mold Lithography for Flexible Plastic Substrates
碩士 === 國立彰化師範大學 === 機電工程學系 === 95 === The thesis studies soft ultraviolet nanoimprint lithography (soft UV-NIL). Isopropanol (IPA) is used to dilute photo-curing resin (U-451D) in order to replace a more expensive UV-curable materials, such as LR8765(BASF AG). At room temperature and low-pressure (&...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/06419816212780950851 |