Ultraviolet Soft-Mold Lithography for Flexible Plastic Substrates

碩士 === 國立彰化師範大學 === 機電工程學系 === 95 === The thesis studies soft ultraviolet nanoimprint lithography (soft UV-NIL). Isopropanol (IPA) is used to dilute photo-curing resin (U-451D) in order to replace a more expensive UV-curable materials, such as LR8765(BASF AG). At room temperature and low-pressure (&...

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Bibliographic Details
Main Authors: Min Yi Hsieh, 謝岷宜
Other Authors: Yeong Lin Lai
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/06419816212780950851