Novel Thin Silicon Layer Transfer Technology Light-Cut
碩士 === 國立中央大學 === 機械工程研究所 === 95 === This dissertation studied a method for transferring of silicon thin layers from a first substrate onto a second substrate. Traditionally the first substrate implanted hydrogen and bonded with the second substrate. Using heat treatment to split the silicon thin la...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97360521989997750100 |