Periodic arrays of silicide nanodots and 2D well-ordered nanostructures fabricated via nanosphere lithography
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 95 === The present study has demonstrated that 2D well-ordered arrays of nickel and cobalt metal nanodots were successfully fabricated on (001) Si and SiGe substrates by using the polystyrene nanosphere lithography (NSL) technique. The interfacial reactions of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78357209241306922519 |