Investigation of Low Temperature Poly-Silicon Thin Film Transistors with Fluorine and Nitrogen Ion implanted Source/Drain
碩士 === 國立交通大學 === 電機學院光電顯示科技產業專班 === 95 === Low-temperature polycrystalline silicon thin film transistors (LTPS TFTs) have attracted much attention due to the possibility of realizing the integration of driving circuits and pixel elements on one substrate，and the potential to accomplish the system-o...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26995614514836536151 |