A Novel Capacitive Micro Sensor

碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 95 === This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequenc...

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Bibliographic Details
Main Authors:	yueh ming cheng, 鄭岳明
Other Authors:	chung yi Huang
Format:	Others
Language:	zh-TW
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/63815127166973438361

id	ndltd-TW-095NCTU5795003
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spelling	ndltd-TW-095NCTU57950032016-05-25T04:13:41Z http://ndltd.ncl.edu.tw/handle/63815127166973438361 A Novel Capacitive Micro Sensor 一種新式電容式感測器 yueh ming cheng 鄭岳明碩士國立交通大學電機學院微電子奈米科技產業專班 95 This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequency interface circuit to achieve signal transfer which suite for data analysis. The circuit will be integrated with the fluid sensor. Not only low fabrication cost and also wide application area, make this sensor a great of economical benefits. The device can use in systems that may damage by fluid to prevent any uncertainty situation. chung yi Huang 黃宇中 2007 學位論文 ; thesis 47 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 95 === This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequency interface circuit to achieve signal transfer which suite for data analysis. The circuit will be integrated with the fluid sensor. Not only low fabrication cost and also wide application area, make this sensor a great of economical benefits. The device can use in systems that may damage by fluid to prevent any uncertainty situation.
author2	chung yi Huang
author_facet	chung yi Huang yueh ming cheng 鄭岳明
author	yueh ming cheng 鄭岳明
spellingShingle	yueh ming cheng 鄭岳明 A Novel Capacitive Micro Sensor
author_sort	yueh ming cheng
title	A Novel Capacitive Micro Sensor
title_short	A Novel Capacitive Micro Sensor
title_full	A Novel Capacitive Micro Sensor
title_fullStr	A Novel Capacitive Micro Sensor
title_full_unstemmed	A Novel Capacitive Micro Sensor
title_sort	novel capacitive micro sensor
publishDate	2007
url	http://ndltd.ncl.edu.tw/handle/63815127166973438361
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A Novel Capacitive Micro Sensor

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