A Novel Capacitive Micro Sensor
碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 95 === This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequenc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63815127166973438361 |