A Novel Capacitive Micro Sensor
碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 95 === This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequenc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63815127166973438361 |
| Summary: | 碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 95 === This paper represent a novel fluid switch device, which consists of two semi-cylindrical metal films as a capacitor to measure the dielectric fluid fulfill in the device. The capacitance changed by fluids which inside the device and a capacitance-frequency interface circuit to achieve signal transfer which suite for data analysis. The circuit will be integrated with the fluid sensor. Not only low fabrication cost and also wide application area, make this sensor a great of economical benefits. The device can use in systems that may damage by fluid to prevent any uncertainty situation.
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