The Characteristic and Application of Ion Beam Alignment to Diamond-Like Carbon

• Main Authors: Chung-Yao Huang, 黃仲堯
• Other Authors: Chia-Fu Chen
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/59956579237660256934

碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 95 === In the conventional process of LCD panel fabrication, the alignment layer（Polyimide）was usually made by rubbing method, however, there were some drawbacks of this procedure including scratches, debris and ESD. The study is the alignment layer made of diamond-like carbon by the non-contact-type ion beam alignment technology in order to improve the quality of LCD product.According to these results, it is apparent that the voltage holding ratio higher than 97%, the residual direct current lower than 500mV and the anchoring energy higher than 1.0×10-5 J/m2 were obtained when the alignment layer made by the ion beam alignment technology. In contrast with traditional PI-rubbing technology, the DLC-IBA technology is a remarkable method to obtain better quality and higher yield of product. Key word：ion beam alignment, diamond-like carbon.