The Characteristic and Application of Ion Beam Alignment to Diamond-Like Carbon

碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 95 === In the conventional process of LCD panel fabrication, the alignment layer(Polyimide)was usually made by rubbing method, however, there were some drawbacks of this procedure including scratches, debris and ESD. The study is the alignment layer made of...

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Bibliographic Details
Main Authors: Chung-Yao Huang, 黃仲堯
Other Authors: Chia-Fu Chen
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/59956579237660256934