Study of Indium Zinc Oxide Thin Film by Magnetron Sputtering
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 95 === In this thesis, according to the theory of physical vapor deposition, we used DC power magnetron sputtering to bombard the target of Indium Zinc Oxide and deposited the transparent solid thin film on glass substrate. We will study and research the ch...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/53577535589266427193 |