The effect of X-ray irradiation on the DNQ-Novolak type photoresist
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 95 === With the flourishing development of photolithographic technology，it allows semiconductor technology to design more circuits in same area。Hence，faster，more multifunction and bigger capacity electronic products are available。The photoresist playing the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09397553232054004433 |