Design and Fabrication of Isolation Feature of MEMS Logic Gates
碩士 === 國立交通大學 === 機械工程系所 === 95 === The problem of “leakage current” and bias current consumption, existed in semiconductor components, is getting more and more attention with widely spreading of mobile devices. RF MEMS switch has been developed as one of the major means to solve this problem. It ha...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87810350986839309019 |