The Study of Nanostructure Fabricated and Anti-reflection Optical Properties On PMMA Substrates
碩士 === 國立交通大學 === 機械工程系所 === 95 === On the silicon wafer with high aspect-ratio nanotip arrays were fabricated by electron cyclotron resonance (ECR) plasma process using self-masked dry etching (SMDE) technique.The nickel-cobalt mold of nanostructure holes was made from silicon nanotips through the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30633364906434781841 |