Study of using anodic aluminum oxide as etching masks
碩士 === 國立交通大學 === 電子物理系所 === 95 === There are two major part in this research. In part one, we use the sample with the structure of Sapphire/SiO2/Al as anode and apply with voltage. In this way, Al layer will be oxidized into anodic aluminum oxide(AAO). By using different two step anodization condit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23982311709120989082 |