Characterization of TFT-SONOS with Nanowire Structure
碩士 === 國立交通大學 === 電子工程系所 === 95 === In this thesis, TFT-SONOS with nanowire structure was fabricated by sidewall spacer over-etching technique. In addition, the double-gated configuration was also studied. The electrical characteristics, programming and erasing characteristics, and reliability of NW...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23050614239986808781 |