Process and Technology for High-k Metal Gate MONOS Structured Non-volatile Memory
博士 === 國立交通大學 === 電子工程系所 === 95 === Recently, the Flash memory is commonly used in portable electronic products, such as cell phone, MP3 player and USB Flash. However, with the increase in requirements for products, the technology and process must be still improved. The key issue for poly-Si floatin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10239991230323352490 |