The Mechanism for Revising Master Production Schedule with Constraint of Process Window and Machine Dedication for Wafer Fabs
碩士 === 國立交通大學 === 工業工程與管理系所 === 95 === As the semiconductor process technology progress, the inevitable trend of IC product developing is toward mini-size. Hence, in order to meet new manufacturing technology and the precise alignment, wafers must be processed on the machines that satisfy process sp...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/58032304919865136529 |