System analysis , sensing circuits design and preliminary fabrication of micro switches using CMOS MEMS process
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 95 === Contact type Microelectromechanical (MEMS) switches are usually subjected to mechanical impact forces during operation and the induced fatigue fracture is traditionally one major concerns for the reliability and longevity of these devices. Therefore, a syst...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/43770590267933876624 |